ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide

标题
ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 4, Pages 1145-1148
出版商
Elsevier BV
发表日期
2009-05-12
DOI
10.1016/j.tsf.2009.04.066

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