The effect of water uptake on the mechanical properties of low-k organosilicate glass
出版年份 2013 全文链接
标题
The effect of water uptake on the mechanical properties of low-k organosilicate glass
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 114, Issue 8, Pages 084103
出版商
AIP Publishing
发表日期
2013-08-26
DOI
10.1063/1.4817917
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Plasma processing of low-k dielectrics
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- (2008) Yunlong Li et al. JOURNAL OF APPLIED PHYSICS
- Mechanical properties of porous methyl silsesquioxane and nanoclustering silica films using atomic force microscope
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