Ultra-low-k cyclic carbon-bridged PMO films with a high chemical resistance

标题
Ultra-low-k cyclic carbon-bridged PMO films with a high chemical resistance
作者
关键词
-
出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 22, Issue 17, Pages 8281
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-02-21
DOI
10.1039/c2jm30312d

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