Evolution of ferroelectric HfO2 in ultrathin region down to 3 nm

标题
Evolution of ferroelectric HfO2 in ultrathin region down to 3 nm
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 10, Pages 102902
出版商
AIP Publishing
发表日期
2018-03-07
DOI
10.1063/1.5017094

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