Modelling the surface generation process during AFM probe-based machining: simulation and experimental validation

标题
Modelling the surface generation process during AFM probe-based machining: simulation and experimental validation
作者
关键词
-
出版物
Surface Topography-Metrology and Properties
Volume 2, Issue 2, Pages 025001
出版商
IOP Publishing
发表日期
2013-12-23
DOI
10.1088/2051-672x/2/2/025001

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