AFM tip-based mechanical nanomachining of 3D micro and nano-structures via the control of the scratching trajectory

出版年份 2017 全文链接

标题

作者

关键词

Atomic force microscope, Mechanical nanomachining, Three dimensional micro and nano-structures, Scratching trajectory

出版物

Volume 248, Issue -, Pages 236-248

出版商

Elsevier BV

发表日期

2017-05-30

DOI

10.1016/j.jmatprotec.2017.05.028

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