Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns

出版年份 2016 全文链接

标题

作者

关键词

Laser direct-writing, Positioning stage, Nano-precision stage, Linear motor precision stage, Nanostructure, Laser interferometer

出版物

Volume 46, Issue -, Pages 263-269

出版商

Elsevier BV

发表日期

2016-06-24

DOI

10.1016/j.precisioneng.2016.05.006

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