Mechanisms of surface reactions in thin solid film chemical deposition processes

标题
Mechanisms of surface reactions in thin solid film chemical deposition processes
作者
关键词
-
出版物
COORDINATION CHEMISTRY REVIEWS
Volume 257, Issue 23-24, Pages 3177-3191
出版商
Elsevier BV
发表日期
2013-04-17
DOI
10.1016/j.ccr.2013.04.006

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