Wafer-scale growth of MoS2thin films by atomic layer deposition

标题
Wafer-scale growth of MoS2thin films by atomic layer deposition
作者
关键词
-
出版物
Nanoscale
Volume 8, Issue 20, Pages 10792-10798
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-04-26
DOI
10.1039/c6nr01346e

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