Chemical kinetics mechanism for chemical mechanical polishing diamond and its related hard-inert materials
出版年份 2017 全文链接
标题
Chemical kinetics mechanism for chemical mechanical polishing diamond and its related hard-inert materials
作者
关键词
Diamond, Chemical mechanical polishing, Chemical kinetics mechanism, Hard-inert material
出版物
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 95, Issue 5-8, Pages 1715-1727
出版商
Springer Nature
发表日期
2017-11-14
DOI
10.1007/s00170-017-1336-4
参考文献
相关参考文献
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