Optical properties of high aspect ratio plasma etched silicon nanowires: fabrication-induced variability dramatically reduces reflectance

标题
Optical properties of high aspect ratio plasma etched silicon nanowires: fabrication-induced variability dramatically reduces reflectance
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 26, Issue 8, Pages 085301
出版商
IOP Publishing
发表日期
2015-02-04
DOI
10.1088/0957-4484/26/8/085301

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