Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties

标题
Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 100, Issue 19, Pages 191912
出版商
AIP Publishing
发表日期
2012-05-12
DOI
10.1063/1.4711767

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