Effect of ammonia (NH3) plasma treatment on silicon nitride (SiNx) gate dielectric for organic thin film transistor with soluble organic semiconductor

标题
Effect of ammonia (NH3) plasma treatment on silicon nitride (SiNx) gate dielectric for organic thin film transistor with soluble organic semiconductor
作者
关键词
-
出版物
CURRENT APPLIED PHYSICS
Volume 11, Issue 5, Pages S67-S72
出版商
Elsevier BV
发表日期
2011-06-05
DOI
10.1016/j.cap.2011.05.021

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