Suppression of Drain Current Leakage and Short-Channel Effect in Lateral Ga2O3 RF MOSFETs Using (Al x Ga1-x )2O3 Back-Barrier

标题
Suppression of Drain Current Leakage and Short-Channel Effect in Lateral Ga2O3 RF MOSFETs Using (Al x Ga1-x )2O3 Back-Barrier
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 44, Issue 11, Pages 1829-1832
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2023-09-23
DOI
10.1109/led.2023.3318215

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