3-D surface stereometry studies of sputtered TiN thin films obtained at different substrate temperatures
出版年份 2016 全文链接
标题
3-D surface stereometry studies of sputtered TiN thin films obtained at different substrate temperatures
作者
关键词
Substrate Temperature, Titanium Nitride, Reactive Magnetron, Wear Resistant Coating, Motif Point
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 28, Issue 2, Pages 2113-2122
出版商
Springer Nature
发表日期
2016-10-06
DOI
10.1007/s10854-016-5774-9
参考文献
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