Film thickness effect on fractality of tin-doped In2O3 thin films

标题
Film thickness effect on fractality of tin-doped In2O3 thin films
作者
关键词
atomic force microscopy, electron beam deposition method, indium tin oxide, multifractal analysis, surface roughness, thin film
出版物
Electronic Materials Letters
Volume 11, Issue 5, Pages 749-757
出版商
Springer Nature
发表日期
2015-09-10
DOI
10.1007/s13391-015-4280-1

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