标题
Effects of substrate temperature on the properties of sputtered TiN thin films
作者
关键词
Substrate Temperature, Power Spectral Density, Atomic Force Microscopy Image, Deposition Temperature, Titanium Nitride
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 27, Issue 3, Pages 2800-2808
出版商
Springer Nature
发表日期
2015-11-23
DOI
10.1007/s10854-015-4093-x
参考文献
相关参考文献
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