Micromorphology characterization of copper thin films by AFM and fractal analysis

标题
Micromorphology characterization of copper thin films by AFM and fractal analysis
作者
关键词
Atomic Force Microscopy, Fractal Dimension, Power Spectral Density, Fractal Analysis, Bidirectional Reflectance Distribution Function
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 26, Issue 12, Pages 9630-9639
出版商
Springer Nature
发表日期
2015-08-18
DOI
10.1007/s10854-015-3628-5

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