Epitaxy of silicon carbide on silicon: Micromorphological analysis of growth surface evolution

出版年份 2015 全文链接

标题

作者

关键词

Epitaxy, Silicon carbide epilayer, Atomic force microscopy, Magnetron sputtering, Substrate, Surface roughness, Fractal analysis

出版物

SUPERLATTICES AND MICROSTRUCTURES

Volume 86, Issue -, Pages 395-402

出版商

Elsevier BV

发表日期

2015-08-11

DOI

10.1016/j.spmi.2015.08.007

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