Effect of capping layer on the ferroelectricity of hafnium oxide

标题
Effect of capping layer on the ferroelectricity of hafnium oxide
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 753, Issue -, Pages 139274
出版商
Elsevier BV
发表日期
2022-04-28
DOI
10.1016/j.tsf.2022.139274

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