Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas

标题
Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 2, Pages 024001
出版商
IOP Publishing
发表日期
2022-01-20
DOI
10.1088/1361-6595/ac4d03

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