Plasma-assisted polishing of gallium nitride to obtain a pit-free and atomically flat surface

出版年份 2015 全文链接

标题

作者

关键词

Polishing, Single crystal, Surface integrity

出版物

Volume 64, Issue 1, Pages 531-534

出版商

Elsevier BV

发表日期

2015-04-21

DOI

10.1016/j.cirp.2015.04.002

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