Characterizations of etch pits formed on single crystal diamond surface using oxygen/hydrogen plasma surface treatment

标题
Characterizations of etch pits formed on single crystal diamond surface using oxygen/hydrogen plasma surface treatment
作者
关键词
Diamond, Etch pit, Point-bottom shape, Flat-bottom shape, Oxygen/hydrogen plasma, Polishing damage, Dislocation
出版物
DIAMOND AND RELATED MATERIALS
Volume 63, Issue -, Pages 43-46
出版商
Elsevier BV
发表日期
2015-09-02
DOI
10.1016/j.diamond.2015.08.012

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