Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality

标题
Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 15, Issue 5, Pages 1700217
出版商
Wiley
发表日期
2018-03-05
DOI
10.1002/ppap.201700217

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