Surface recombination of oxygen atoms in O2plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes

标题
Surface recombination of oxygen atoms in O2plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 1, Pages 015201
出版商
IOP Publishing
发表日期
2010-12-09
DOI
10.1088/0022-3727/44/1/015201

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