Microstructure control in TiAlN/SiNx multilayers with appropriate thickness ratios for improvement of hardness and anti-corrosion characteristics

标题
Microstructure control in TiAlN/SiNx multilayers with appropriate thickness ratios for improvement of hardness and anti-corrosion characteristics
作者
关键词
-
出版物
VACUUM
Volume 87, Issue -, Pages 195-199
出版商
Elsevier BV
发表日期
2012-03-08
DOI
10.1016/j.vacuum.2012.02.052

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