The effect of titanium current on structure and hardness of aluminium titanium nitride deposited by reactive unbalanced magnetron co-sputtering

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 519, Issue 15, Pages 4963-4968

出版商

Elsevier BV

发表日期

2011-01-15

DOI

10.1016/j.tsf.2011.01.062

Discuss science. Find collaborators. Network.

Join a conversation

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started