Thermal Stability of TiAlN and Nanocomposite TiAlSiN Thin Films

标题
Thermal Stability of TiAlN and Nanocomposite TiAlSiN Thin Films
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 9, Issue 2, Pages 1108-1112
出版商
American Scientific Publishers
发表日期
2009-03-04
DOI
10.1166/jnn.2009.c098

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