Control of phase purity in high scandium fraction heteroepitaxial ScAlN grown by molecular beam epitaxy
出版年份 2020 全文链接
标题
Control of phase purity in high scandium fraction heteroepitaxial ScAlN grown by molecular beam epitaxy
作者
关键词
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出版物
Applied Physics Express
Volume 13, Issue 6, Pages 065509
出版商
IOP Publishing
发表日期
2020-05-08
DOI
10.35848/1882-0786/ab916a
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- AlScN: A III-V semiconductor based ferroelectric
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