Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
出版年份 2014 全文链接
标题
Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
作者
关键词
-
出版物
ECS Journal of Solid State Science and Technology
Volume 3, Issue 7, Pages P253-P258
出版商
The Electrochemical Society
发表日期
2014-06-11
DOI
10.1149/2.0141407jss
参考文献
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