TiNx/Hf0.5Zr0.5O2/TiNx ferroelectric memory with tunable transparency and suppressed wake-up effect

标题
TiNx/Hf0.5Zr0.5O2/TiNx ferroelectric memory with tunable transparency and suppressed wake-up effect
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 114, Issue 5, Pages 052902
出版商
AIP Publishing
发表日期
2019-02-07
DOI
10.1063/1.5083231

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