Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors

标题
Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 96, Issue 23, Pages 233504
出版商
AIP Publishing
发表日期
2010-06-08
DOI
10.1063/1.3447795

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