Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation

出版年份 2008 全文链接

标题

Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation

作者

关键词

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出版物

NANOTECHNOLOGY

Volume 19, Issue 41, Pages 415704

出版商

IOP Publishing

发表日期

2008-09-05

DOI

10.1088/0957-4484/19/41/415704

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