Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide

Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD

(2013) Stephen E. Potts et al.   CHEMICAL VAPOR DEPOSITION

Kinetics of anatase phase formation in TiO2 films during atomic layer deposition and post-deposition annealing

(2013) Grzegorz Luka et al.   CRYSTENGCOMM

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Production of photocatalytically active titania layers: A comparison of plasma processes and coating properties

(2013) Eva Maria Moser et al.   SURFACE & COATINGS TECHNOLOGY

Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

(2013) Chao Zhao et al.   THIN SOLID FILMS

Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation

(2013) Dong-Suk Han et al.   THIN SOLID FILMS

Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film

(2012) Jaesang Lee et al.   ECS Journal of Solid State Science and Technology

Photocatalytic effect of thermal atomic layer deposition of TiO2 on stainless steel

(2011) Hyemin Kang et al.   APPLIED CATALYSIS B-ENVIRONMENTAL

Growth of Rutile Titanium Dioxide Nanowires by Pulsed Chemical Vapor Deposition

(2011) Jian Shi et al.   CRYSTAL GROWTH & DESIGN

Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films

(2011) H. B. Profijt et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Atomic layer deposition of nanolaminate oxide films on Si

(2011) M. Tallarida et al.   JOURNAL OF NANOPARTICLE RESEARCH

Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides

(2011) H. B. Profijt et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles

(2010) A.P. Alekhin et al.   APPLIED SURFACE SCIENCE

Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films

(2010) S. E. Potts et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

(2009) Chang-Soo Lee et al.   APPLIED CATALYSIS B-ENVIRONMENTAL

All dielectric hard x-ray mirror by atomic layer deposition

(2009) Adriana Szeghalmi et al.   APPLIED PHYSICS LETTERS

Explosive Crystallization in Atomic Layer Deposited Mixed Titanium Oxides

(2009) Viljami Pore et al.   CRYSTAL GROWTH & DESIGN

Growth of Crystalline TiO2by Plasma Enhanced Chemical Vapor Deposition

(2009) Ana Borras et al.   CRYSTAL GROWTH & DESIGN

Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide

(2009) Vikrant R. Rai et al.   Journal of Physical Chemistry C

Growth Kinetics and Crystallization Behavior of TiO[sub 2] Films Prepared by Plasma Enhanced Atomic Layer Deposition

(2008) Qi Xie et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY