Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide

标题
Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 113, Issue 30, Pages 12962-12965
出版商
American Chemical Society (ACS)
发表日期
2009-07-02
DOI
10.1021/jp903669c

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