Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides

标题
Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 4, Pages G88
出版商
The Electrochemical Society
发表日期
2011-02-26
DOI
10.1149/1.3552663

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