History of atomic layer deposition and its relationship with the American Vacuum Society

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques

(2012) Byoung H. Lee et al.   ADVANCED FUNCTIONAL MATERIALS

Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition

(2012) Shih-Hui Jen et al.   APPLIED PHYSICS LETTERS

Stabilization of [Ru(bpy)2(4,4′-(PO3H2)bpy)]2+ on Mesoporous TiO2 with Atomic Layer Deposition of Al2O3

(2012) Kenneth Hanson et al.   CHEMISTRY OF MATERIALS

Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition

(2012) Byoung H. Lee et al.   Journal of Physical Chemistry C

Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth

(2012) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

On the kinetics of spatial atomic layer deposition

(2012) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths

(2011) Bo Gong et al.   CHEMISTRY OF MATERIALS

Metalcones: Hybrid Organic–Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques

(2011) Steven M. George et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

(2011) W.M.M. (Erwin) Kessels et al.   MRS BULLETIN

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

(2010) Qing Peng et al.   ADVANCED MATERIALS

Surface Modification of SnO2 Photoelectrodes in Dye-Sensitized Solar Cells: Significant Improvements in Photovoltage via Al2O3 Atomic Layer Deposition

(2010) Chaiya Prasittichai et al.   Journal of Physical Chemistry Letters

Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers

(2009) Steven M. George et al.   ACCOUNTS OF CHEMICAL RESEARCH

Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films using Diethylzinc and Ethylene Glycol

(2009) Byunghoon Yoon et al.   CHEMICAL VAPOR DEPOSITION

“Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition

(2009) Qing Peng et al.   CHEMISTRY OF MATERIALS

Oxide Electronics by Spatial Atomic Layer Deposition

(2009) David H. Levy et al.   Journal of Display Technology

Enhanced Stability of LiCoO[sub 2] Cathodes in Lithium-Ion Batteries Using Surface Modification by Atomic Layer Deposition

(2009) Yoon Seok Jung et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Radial Electron Collection in Dye-Sensitized Solar Cells

(2008) Alex B. F. Martinson et al.   NANO LETTERS