An introduction to thin film processing using high-power impulse magnetron sputtering
出版年份 2012 全文链接
标题
An introduction to thin film processing using high-power impulse magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 27, Issue 05, Pages 780-792
出版商
Cambridge University Press (CUP)
发表日期
2012-02-08
DOI
10.1557/jmr.2012.8
参考文献
相关参考文献
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