Synthesis of α-Al2 O3 thin films using reactive high-power impulse magnetron sputtering

标题
Synthesis of α-Al2 O3 thin films using reactive high-power impulse magnetron sputtering
作者
关键词
-
出版物
EPL
Volume 82, Issue 3, Pages 36002
出版商
IOP Publishing
发表日期
2008-04-24
DOI
10.1209/0295-5075/82/36002

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