Measurements of Deposition Rate and Substrate Heating in a HiPIMS Discharge

标题
Measurements of Deposition Rate and Substrate Heating in a HiPIMS Discharge
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S543-S547
出版商
Wiley
发表日期
2009-05-26
DOI
10.1002/ppap.200931202

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