Designing high performance precursors for atomic layer deposition of silicon oxide

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Title
Designing high performance precursors for atomic layer deposition of silicon oxide
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 1, Pages 01A137
Publisher
American Vacuum Society
Online
2014-12-12
DOI
10.1116/1.4903275

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