Designing high performance precursors for atomic layer deposition of silicon oxide

标题
Designing high performance precursors for atomic layer deposition of silicon oxide
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 1, Pages 01A137
出版商
American Vacuum Society
发表日期
2014-12-12
DOI
10.1116/1.4903275

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