Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble

Title
Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble
Authors
Keywords
-
Journal
EXPERT SYSTEMS WITH APPLICATIONS
Volume 36, Issue 2, Pages 1978-1998
Publisher
Elsevier BV
Online
2007-12-28
DOI
10.1016/j.eswa.2007.12.015

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