Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications

Title
Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
Authors
Keywords
-
Journal
ETRI JOURNAL
Volume 35, Issue 4, Pages 617-624
Publisher
Wiley
Online
2013-07-29
DOI
10.4218/etrij.13.1912.0008

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