4.2 Article

Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications

期刊

ETRI JOURNAL
卷 35, 期 4, 页码 617-624

出版社

WILEY
DOI: 10.4218/etrij.13.1912.0008

关键词

Gas sensor; metal oxide; nanopowder; microheater

资金

  1. Korea Innovation Cluster Foundation
  2. Ministry of Knowledge Economy (MKE, Korea)
  3. MKE/KEIT [10035570]
  4. Korea Evaluation Institute of Industrial Technology (KEIT) [10035570] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

向作者/读者索取更多资源

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a NO2 or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.2
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Chemistry, Analytical

Highly flexible, mechanically stable, and sensitive NO2 gas sensors based on reduced graphene oxide nanofibrous mesh fabric for flexible electronics

Hyung Ju Park, Wan-Joong Kim, Hyung-Kun Lee, Dae-Sik Lee, Jong-Ho Shin, Yongseok Jun, Yong Ju Yun

SENSORS AND ACTUATORS B-CHEMICAL (2018)

Article Chemistry, Multidisciplinary

Highly stretchable, mechanically stable, and weavable reduced graphene oxide yarn with high NO2 sensitivity for wearable gas sensors

Yong Ju Yun, Do Yeob Kim, Won G. Hong, Dong Han Ha, Yongseok Jun, Hyung-Kun Lee

RSC ADVANCES (2018)

Article Physics, Multidisciplinary

Deposition Pressure Dependent Electric Properties of (Hf, Zr)O2 Thin Films Made by RF Sputtering Deposition Method

S. E. Moon, J. H. Kim, J. P. Im, J. Lee, S. Y. Im, S. H. Hong, S. Y. Kang, S. M. Yoon

JOURNAL OF THE KOREAN PHYSICAL SOCIETY (2018)

Article Physics, Multidisciplinary

Design and Fabrication of a Thermoelectric Generator Based on BiTe Legs to power Wearable Device

S. E. Moon, J. Kim, S. -M. Lee, J. Lee, J. P. Im, J. H. Kim, S. Y. Im, E. B. Jeon, B. Kwon, H. Kim, J. -S. Kim

JOURNAL OF THE KOREAN PHYSICAL SOCIETY (2018)

Article Chemistry, Analytical

Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor

Jaewoo Lee, Jong-Pil Im, Jeong-Hun Kim, Sol-Yee Lim, Seung-Eon Moon

SENSORS (2019)

Article Engineering, Electrical & Electronic

Impact of Thickness Control of Hf0.5Zr0.5O2 Films for the Metal-Ferroelectric-Insulator-Semiconductor Capacitors

Dae-Hong Min, Seung Youl Kang, Seung-Eon Moon, Sung-Min Yoon

IEEE ELECTRON DEVICE LETTERS (2019)

Article Chemistry, Analytical

Sonochemical synthesis of HKUST-1-based CuO decorated with Pt nanoparticles for formaldehyde gas-sensor applications

Jae Eun Lee, Do Yeob Kim, Hyung-Kun Lee, Hyung Ju Park, Ahyeon Ma, Sung-Yool Choi, Dae-Sik Lee

SENSORS AND ACTUATORS B-CHEMICAL (2019)

Article Chemistry, Analytical

Commercial silk-based electronic textiles for NO2 sensing

Won Taek Jung, Jun Woo Jeon, Hyun-Seok Jang, Do Yeob Kim, Hyung-Kun Lee, Byung Hoon Kim

SENSORS AND ACTUATORS B-CHEMICAL (2020)

Article Chemistry, Analytical

Phase transition of non-equilibrium wurtzite CoO: Spontaneous deposition of sensing material for ultrasensitive detection of acetone

Ahyeon Ma, Hyung Ju Park, Jong Hyeok Seo, Kyu Yeon Jang, Hyung Kun Lee, Do Yeob Kim, Jae Eun Lee, Ki Min Nam, Dae-Sik Lee

SENSORS AND ACTUATORS B-CHEMICAL (2020)

Article Polymer Science

Ultrafast Room Temperature Synthesis of Porous Polythiophene via Atmospheric Pressure Plasma Polymerization Technique and Its Application to NO2 Gas Sensors

Choon-Sang Park, Do Yeob Kim, Eun Young Jung, Hyo Jun Jang, Gyu Tae Bae, Jae Young Kim, Bhum Jae Shin, Hyung-Kun Lee, Heung-Sik Tae

Summary: A novel method for directly depositing nanostructured conducting porous polythiophene films on substrates at room temperature is proposed, showing fast deposition rate and high sensitivity. Comparison between pure and iodine-doped PTh films was conducted to demonstrate the effects of iodine doping, and the NO2-sensing properties of the iodine-doped PTh films-based gas sensors were investigated. The proposed approach allows simultaneous synthesis of sensing materials and fabrication of gas sensors.

POLYMERS (2021)

Article Chemistry, Physical

Potential Application of Pin-to-Liquid Dielectric Barrier Discharge Structure in Decomposing Aqueous Phosphorus Compounds for Monitoring Water Quality

Gyu Tae Bae, Jae Young Kim, Do Yeob Kim, Eun Young Jung, Hyo Jun Jang, Choon-Sang Park, Hyeseung Jang, Dong Ho Lee, Hyung-Kun Lee, Heung-Sik Tae

Summary: The pin-to-liquid DBD reactor utilizes water as a dielectric barrier for stable and effective treatment of aqueous solutions, showing promising performance in decomposing phosphorus compounds. It could be a standard pretreatment method for decomposing phosphorus compounds in water, comparable to thermochemical pretreatment methods.

MATERIALS (2021)

Article Polymer Science

Reusable and pH-Stable Luminescent Sensors for Highly Selective Detection of Phosphate

Do Yeob Kim, Dong Gyu Kim, Bongjin Jeong, Young Il Kim, Jungseok Heo, Hyung-Kun Lee

Summary: In this paper, a luminescent coordination polymer particle (CPP) that can selectively and sensitively respond to phosphate ions in an aquatic ecosystem is reported. The CPPs, embedded into membranes for reuse, exhibit consistent luminescence signals in different pH ranges. The practical application of the sensor is confirmed by detecting phosphate in actual environmental samples.

POLYMERS (2022)

Article Chemistry, Analytical

Breath analyzer for personalized monitoring of exercise-induced metabolic fat burning

Dionisio V. Del Orbe, Hyung Ju Park, Myung-Joon Kwack, Hyung-Kun Lee, Do Yeob Kim, Jung Gweon Lim, Inkyu Park, Minji Sohn, Soo Lim, Dae-Sik Lee

Summary: Obesity increases the risk of chronic diseases, and it is important to develop portable devices to monitor exercise-induced fat burn in real time for weight management. In this study, a compact breath analyzer was developed for convenient and noninvasive estimation of fat burning, which showed a high level of accuracy using a machine learning algorithm.

SENSORS AND ACTUATORS B-CHEMICAL (2022)

Article Polymer Science

Ion-Selective Electrode Based on a Novel Biomimetic Nicotinamide Compound for Phosphate Ion Sensor

Bongjin Jeong, Jin Seong Oh, Do Yeob Kim, Dong Gyu Kim, Young Il Kim, Jungseok Heo, Hyung-Kun Lee

Summary: Phosphorus is an important nutrient in aquatic habitats, but it can also inhibit growth in aquatic ecosystems and contribute to environmental issues. Rapid phosphorus detection is of growing interest for water resource management and protection. A new ionophore based on a biomimetic nicotinamide functional group, combined with a silicone rubber ion-selective electrode membrane, showed efficient and selective detection of phosphate ions.

POLYMERS (2022)

Proceedings Paper Engineering, Electrical & Electronic

Development of Sensors for On-Site Analysis of Total Dissolved Phosphorus in Natural Waters

Do Yeob Kim, Young Jae Im, Joho Yun, Choon-Sang Park, Gyu Tae Bae, Heung-Sik Tae, Hyung-Kun Lee

2019 IEEE SENSORS (2019)

暂无数据