Journal
ETRI JOURNAL
Volume 31, Issue 4, Pages 351-356Publisher
WILEY
DOI: 10.4218/etrij.09.0109.0006
Keywords
Nanogap; freestanding nanowires; angle evaporation
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We present a simple semiconductor process to fabricate nanogap arrays for application in molecular electronics and nano-bio, electronics using a combination of freestanding silicon nanowires and angle evaporation. The gap distance is modulated using the height of the silicon dioxide, the width of the Si nanowires, and the evaporation angle. In addition, we fabricate and apply the nanogap, arrays in single-electron transistors using DNA-linked Au nanoparticles for the detection of DNA hybridization.
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