期刊
ETRI JOURNAL
卷 31, 期 4, 页码 351-356出版社
WILEY
DOI: 10.4218/etrij.09.0109.0006
关键词
Nanogap; freestanding nanowires; angle evaporation
We present a simple semiconductor process to fabricate nanogap arrays for application in molecular electronics and nano-bio, electronics using a combination of freestanding silicon nanowires and angle evaporation. The gap distance is modulated using the height of the silicon dioxide, the width of the Si nanowires, and the evaporation angle. In addition, we fabricate and apply the nanogap, arrays in single-electron transistors using DNA-linked Au nanoparticles for the detection of DNA hybridization.
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