Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 44, Issue 2, Pages 115

出版商

Institution of Engineering and Technology (IET)

发表日期

2008-01-19

DOI

10.1049/el:20082985

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