Growth and characterization of Mg x Zn1−x O thin films by aerosol-assisted chemical vapor deposition (AACVD)

Published 2014 View Full Article

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Title
Growth and characterization of Mg x Zn1−x O thin films by aerosol-assisted chemical vapor deposition (AACVD)
Authors
Keywords
ZnO, Mg<sub><em class=EmphasisTypeItalic >x</em></sub>Zn<sub>1−<em class=EmphasisTypeItalic >x</em></sub>O, MgZnO, thin films, CVD, XRD
Journal
Electronic Materials Letters
Volume 10, Issue 1, Pages 61-65
Publisher
Springer Nature
Online
2014-01-27
DOI
10.1007/s13391-013-3039-9
References
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