Growth and characterization of Mg x Zn1−x O thin films by aerosol-assisted chemical vapor deposition (AACVD)

标题
Growth and characterization of Mg x Zn1−x O thin films by aerosol-assisted chemical vapor deposition (AACVD)
作者
关键词
ZnO, Mg<sub><em class=EmphasisTypeItalic >x</em></sub>Zn<sub>1−<em class=EmphasisTypeItalic >x</em></sub>O, MgZnO, thin films, CVD, XRD
出版物
Electronic Materials Letters
Volume 10, Issue 1, Pages 61-65
出版商
Springer Nature
发表日期
2014-01-27
DOI
10.1007/s13391-013-3039-9

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